JPH0225838U - - Google Patents
Info
- Publication number
- JPH0225838U JPH0225838U JP10359888U JP10359888U JPH0225838U JP H0225838 U JPH0225838 U JP H0225838U JP 10359888 U JP10359888 U JP 10359888U JP 10359888 U JP10359888 U JP 10359888U JP H0225838 U JPH0225838 U JP H0225838U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- ellipsometer
- sample table
- moving
- measures
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000010287 polarization Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 1
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10359888U JPH0225838U (en]) | 1988-08-04 | 1988-08-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10359888U JPH0225838U (en]) | 1988-08-04 | 1988-08-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0225838U true JPH0225838U (en]) | 1990-02-20 |
Family
ID=31334578
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10359888U Pending JPH0225838U (en]) | 1988-08-04 | 1988-08-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0225838U (en]) |
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1988
- 1988-08-04 JP JP10359888U patent/JPH0225838U/ja active Pending